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1 Ergebnisse
1
Self-Passivation by Fluorine Plasma Treatment and Low-Tempe..:
Chang, Kow-Ming
;
Lai, Chiung-Hui
;
Chen, Chu-Feng
...
Journal of Nanoscience. 2014 (2014) - p. 1-7 , 2014
Link:
https://doi.org/10.1155/2014/961720
RT Journal T1
Self-Passivation by Fluorine Plasma Treatment and Low-Temperature Annealing in SiGe Nanowires for Biochemical Sensors
UL https://suche.suub.uni-bremen.de/peid=cr-10.1155_2014_961720&Exemplar=1&LAN=DE A1 Chang, Kow-Ming A1 Lai, Chiung-Hui A1 Chen, Chu-Feng A1 Kuo, Po-Shen A1 Chen, Yi-Ming A1 Chang, Tai-Yuan A1 Whang, Allen Jong-Woei A1 Lai, Yi-Lung A1 Chen, Huai-Yi A1 Hsieh, Ing-Jar PB Hindawi Limited YR 2014 SN 2356-749X SN 2314-6931 JF Journal of Nanoscience VO 2014 SP 1 OP 7 LK http://dx.doi.org/https://doi.org/10.1155/2014/961720 DO https://doi.org/10.1155/2014/961720 SF ELIB - SuUB Bremen
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