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Material Sputtering with a Multi-Ion Species Plasma Focused..:
Brogden, Valerie
;
Johnson, Cameron
;
Rue, Chad
...
Advances in Materials Science and Engineering. 2021 (2021) - p. 1-9 , 2021
Link:
https://doi.org/10.1155/2021/8842777
RT Journal T1
Material Sputtering with a Multi-Ion Species Plasma Focused Ion Beam
UL https://suche.suub.uni-bremen.de/peid=cr-10.1155_2021_8842777&Exemplar=1&LAN=DE A1 Brogden, Valerie A1 Johnson, Cameron A1 Rue, Chad A1 Graham, Jeremy A1 Langworthy, Kurt A1 Golledge, Stephen A1 McMorran, Ben A1 Dinda, Guru P. PB Hindawi Limited YR 2021 SN 1687-8442 SN 1687-8434 JF Advances in Materials Science and Engineering VO 2021 SP 1 OP 9 LK http://dx.doi.org/https://doi.org/10.1155/2021/8842777 DO https://doi.org/10.1155/2021/8842777 SF ELIB - SuUB Bremen
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