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1 Ergebnisse
1
Reactive Ion Etching (RIE) Induced Surface Roughness Precis..:
Oliveira, Emerson
;
Strassner, Johannes
;
Doering, Christoph
..
Advances in Materials Science and Engineering. 2022 (2022) - p. 1-7 , 2022
Link:
https://doi.org/10.1155/2022/9747505
RT Journal T1
Reactive Ion Etching (RIE) Induced Surface Roughness Precisely Monitored In-Situ and in Real Time by Reflectance Anisotropy Spectroscopy (RAS) in Combination with Principle Component Analysis (PCA)
UL https://suche.suub.uni-bremen.de/peid=cr-10.1155_2022_9747505&Exemplar=1&LAN=DE A1 Oliveira, Emerson A1 Strassner, Johannes A1 Doering, Christoph A1 Fouckhardt, Henning A1 Zang, Zhigang PB Hindawi Limited YR 2022 SN 1687-8442 SN 1687-8434 JF Advances in Materials Science and Engineering VO 2022 SP 1 OP 7 LK http://dx.doi.org/https://doi.org/10.1155/2022/9747505 DO https://doi.org/10.1155/2022/9747505 SF ELIB - SuUB Bremen
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