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Tool life and wear mechanisms of CVD coated and uncoated Si..:

Osmond, Luke ; Cook, Ian ; Curtis, David.
Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture.  238 (2023)  6-7 - p. 1069-1083 , 2023
Link: https://doi.org/10.1177/09544054231180653