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1 Ergebnisse
1
Effects of etching holes on complementary metal oxide semic..:
Tu, Wei-Hsiang
;
Chu, Wen-Chang
;
Lee, Chih-Kung
..
Journal of Intelligent Material Systems and Structures. 24 (2012) 3 - p. 310-317 , 2012
Link:
https://doi.org/10.1177/1045389x12449917
RT Journal T1 <Title>Effects of etching holes on complementary metal oxide semiconductor–microelectromechanical systems capacitive structure</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1177_1045389x12449917&Exemplar=1&LAN=DE A1 Tu, Wei-Hsiang A1 Chu, Wen-Chang A1 Lee, Chih-Kung A1 Chang, Pei-Zen A1 Hu, Yuh-Chung PB SAGE Publications YR 2012 SN 1045-389X SN 1530-8138 JF Journal of Intelligent Material Systems and Structures VO 24 IS 3 SP 310 OP 317 LK http://dx.doi.org/https://doi.org/10.1177/1045389x12449917 DO https://doi.org/10.1177/1045389x12449917 SF ELIB - SuUB Bremen
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