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1 Ergebnisse
1
Design and fabrication of a microelectromechanical system r..:
Acevedo-Mijangos, Jesús
;
Ramírez-Treviño, Antonio
;
May-Arrioja, Daniel A
...
Advances in Mechanical Engineering. 11 (2019) 7 - p. 168781401985368 , 2019
Link:
https://doi.org/10.1177/1687814019853683
RT Journal T1
Design and fabrication of a microelectromechanical system resonator based on two orthogonal silicon beams with integrated mirror for monitoring in-plane magnetic field
UL https://suche.suub.uni-bremen.de/peid=cr-10.1177_1687814019853683&Exemplar=1&LAN=DE A1 Acevedo-Mijangos, Jesús A1 Ramírez-Treviño, Antonio A1 May-Arrioja, Daniel A A1 LiKamWa, Patrick A1 Vázquez-Leal, Héctor A1 Herrera-May, Agustín L PB SAGE Publications YR 2019 SN 1687-8140 SN 1687-8140 JF Advances in Mechanical Engineering VO 11 IS 7 SP 168781401985368 LK http://dx.doi.org/https://doi.org/10.1177/1687814019853683 DO https://doi.org/10.1177/1687814019853683 SF ELIB - SuUB Bremen
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