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1 Ergebnisse
1
Thermal Decomposition In Situ Monitoring System of the Gas ..:
An, Jong-Ki
;
Choi, Eunmi
;
Shim, Seob
...
Nanoscale Research Letters. 15 (2020) 1 - p. , 2020
Link:
https://doi.org/10.1186/s11671-020-03400-2
RT Journal T1
Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1186_s11671-020-03400-2&Exemplar=1&LAN=DE A1 An, Jong-Ki A1 Choi, Eunmi A1 Shim, Seob A1 Kim, Hayeong A1 Kang, Goru A1 Yun, Ju-Young PB Springer Science and Business Media LLC YR 2020 SN 1556-276X JF Nanoscale Research Letters VO 15 IS 1 LK http://dx.doi.org/https://doi.org/10.1186/s11671-020-03400-2 DO https://doi.org/10.1186/s11671-020-03400-2 SF ELIB - SuUB Bremen
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