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1 Ergebnisse
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Novel measurement method of internal stress in thin films u..:
TAKASE, Shun
;
YAMAZAKI, Takahiro
;
OKA, Chiemi
..
Mechanical Engineering Journal. 10 (2023) 4 - p. 23-00074-23-00074 , 2023
Link:
https://doi.org/10.1299/mej.23-00074
RT Journal T1 <Title>Novel measurement method of internal stress in thin films using micro spring structure</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1299_mej.23-00074&Exemplar=1&LAN=DE A1 TAKASE, Shun A1 YAMAZAKI, Takahiro A1 OKA, Chiemi A1 SAKURAI, Junpei A1 HATA, Seiichi PB Japan Society of Mechanical Engineers YR 2023 SN 2187-9745 JF Mechanical Engineering Journal VO 10 IS 4 SP 23 OP 00074-23-00074 LK http://dx.doi.org/https://doi.org/10.1299/mej.23-00074 DO https://doi.org/10.1299/mej.23-00074 SF ELIB - SuUB Bremen
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