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1 Ergebnisse
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Amorphous silicon and amorphous silicon nitride films prepa..:
Tsai, Rung-Ywan
;
Kuo, Lee-Chin
;
Ho, Fang Chuan
Applied Optics. 32 (1993) 28 - p. 5561 , 1993
Link:
https://doi.org/10.1364/ao.32.005561
RT Journal T1
Amorphous silicon and amorphous silicon nitride films prepared by a plasma-enhanced chemical vapor deposition process as optical coating materials
UL https://suche.suub.uni-bremen.de/peid=cr-10.1364_ao.32.005561&Exemplar=1&LAN=DE A1 Tsai, Rung-Ywan A1 Kuo, Lee-Chin A1 Ho, Fang Chuan PB Optica Publishing Group YR 1993 SN 0003-6935 SN 1539-4522 JF Applied Optics VO 32 IS 28 SP 5561 LK http://dx.doi.org/https://doi.org/10.1364/ao.32.005561 DO https://doi.org/10.1364/ao.32.005561 SF ELIB - SuUB Bremen
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