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1 Ergebnisse
1
Absolute thickness metrology with submicrometer accuracy us..:
Zhao, Yang
;
Schmidt, Greg
;
Moore, Duncan T.
.
Applied Optics. 54 (2015) 25 - p. 7693 , 2015
Link:
https://doi.org/10.1364/ao.54.007693
RT Journal T1
Absolute thickness metrology with submicrometer accuracy using a low-coherence distance measuring interferometer
UL https://suche.suub.uni-bremen.de/peid=cr-10.1364_ao.54.007693&Exemplar=1&LAN=DE A1 Zhao, Yang A1 Schmidt, Greg A1 Moore, Duncan T. A1 Ellis, Jonathan D. PB The Optical Society YR 2015 SN 0003-6935 SN 1539-4522 JF Applied Optics VO 54 IS 25 SP 7693 LK http://dx.doi.org/https://doi.org/10.1364/ao.54.007693 DO https://doi.org/10.1364/ao.54.007693 SF ELIB - SuUB Bremen
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