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1 Ergebnisse
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Autofocusing system for spatial light modulator-based maskl..:
Schlangen, Sebastian
;
Ihme, Maximilian
;
Rahlves, Maik
.
Applied Optics. 55 (2016) 8 - p. 1863 , 2016
Link:
https://doi.org/10.1364/ao.55.001863
RT Journal T1
Autofocusing system for spatial light modulator-based maskless lithography
UL https://suche.suub.uni-bremen.de/peid=cr-10.1364_ao.55.001863&Exemplar=1&LAN=DE A1 Schlangen, Sebastian A1 Ihme, Maximilian A1 Rahlves, Maik A1 Roth, Bernhard PB Optica Publishing Group YR 2016 SN 0003-6935 SN 1539-4522 JF Applied Optics VO 55 IS 8 SP 1863 LK http://dx.doi.org/https://doi.org/10.1364/ao.55.001863 DO https://doi.org/10.1364/ao.55.001863 SF ELIB - SuUB Bremen
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