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1 Ergebnisse
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Parametric modeling of edge effects for polishing tool infl..:
Wook Kim, Dae
;
Hyun Park, Won
;
Kim, Sug-Whan
.
Optics Express. 17 (2009) 7 - p. 5656 , 2009
Link:
https://doi.org/10.1364/oe.17.005656
RT Journal T1
Parametric modeling of edge effects for polishing tool influence functions
UL https://suche.suub.uni-bremen.de/peid=cr-10.1364_oe.17.005656&Exemplar=1&LAN=DE A1 Wook Kim, Dae A1 Hyun Park, Won A1 Kim, Sug-Whan A1 Burge, James H. PB Optica Publishing Group YR 2009 SN 1094-4087 JF Optics Express VO 17 IS 7 SP 5656 LK http://dx.doi.org/https://doi.org/10.1364/oe.17.005656 DO https://doi.org/10.1364/oe.17.005656 SF ELIB - SuUB Bremen
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