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1 Ergebnisse
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Fast thermal aberration model for lithographic projection l..:
Zhu, Boer
;
Li, Sikun
;
Mao, Yanjie
...
Optics Express. 27 (2019) 23 - p. 34038 , 2019
Link:
https://doi.org/10.1364/oe.27.034038
RT Journal T1
Fast thermal aberration model for lithographic projection lenses
UL https://suche.suub.uni-bremen.de/peid=cr-10.1364_oe.27.034038&Exemplar=1&LAN=DE A1 Zhu, Boer A1 Li, Sikun A1 Mao, Yanjie A1 Wang, Xiangzhao A1 Bu, Yang A1 Wang, Jian A1 Sun, Gang A1 Duan, Lifeng PB The Optical Society YR 2019 SN 1094-4087 JF Optics Express VO 27 IS 23 SP 34038 LK http://dx.doi.org/https://doi.org/10.1364/oe.27.034038 DO https://doi.org/10.1364/oe.27.034038 SF ELIB - SuUB Bremen
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