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1 Ergebnisse
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Aberration calibration and correction with nano-scatterers ..:
Messinis, Christos
;
van Schaijk, Theodorus T. M.
;
Pandey, Nitesh
...
Optics Express. 29 (2021) 23 - p. 38237 , 2021
Link:
https://doi.org/10.1364/oe.438026
RT Journal T1
Aberration calibration and correction with nano-scatterers in digital holographic microscopy for semiconductor metrology
UL https://suche.suub.uni-bremen.de/peid=cr-10.1364_oe.438026&Exemplar=1&LAN=DE A1 Messinis, Christos A1 van Schaijk, Theodorus T. M. A1 Pandey, Nitesh A1 Koolen, Armand A1 Shlesinger, Ilan A1 Liu, Xiaomeng A1 Witte, Stefan A1 de Boer, Johannes F. A1 den Boef, Arie PB Optica Publishing Group YR 2021 SN 1094-4087 JF Optics Express VO 29 IS 23 SP 38237 LK http://dx.doi.org/https://doi.org/10.1364/oe.438026 DO https://doi.org/10.1364/oe.438026 SF ELIB - SuUB Bremen
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