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1 Ergebnisse
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Surface processing of PMMA and metal nano-particle resist b..:
Sakaue, Kazuyuki
;
Motoyama, Hiroto
;
Hayashi, Ryosuke
...
Optics Letters. 45 (2020) 10 - p. 2926 , 2020
Link:
https://doi.org/10.1364/ol.392695
RT Journal T1
Surface processing of PMMA and metal nano-particle resist by sub-micrometer focusing of coherent extreme ultraviolet high-order harmonics pulses
UL https://suche.suub.uni-bremen.de/peid=cr-10.1364_ol.392695&Exemplar=1&LAN=DE A1 Sakaue, Kazuyuki A1 Motoyama, Hiroto A1 Hayashi, Ryosuke A1 Iwasaki, Atsushi A1 Mimura, Hidekazu A1 Yamanouchi, Kaoru A1 Shibuya, Tatsunori A1 Ishino, Masahiko A1 Dinh, Thanh-Hung A1 Ogawa, Hiroshi A1 Higashiguchi, Takeshi A1 Nishikino, Masaharu A1 Kuroda, Ryunosuke PB Optica Publishing Group YR 2020 SN 0146-9592 SN 1539-4794 JF Optics Letters VO 45 IS 10 SP 2926 LK http://dx.doi.org/https://doi.org/10.1364/ol.392695 DO https://doi.org/10.1364/ol.392695 SF ELIB - SuUB Bremen
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