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1 Ergebnisse
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Spectroscopic characterization of Si/Mo thin-film stack at ..:
Li, Yen-Yin
;
Lee, Yin-Wen
;
Ho, Tuan-Shu
...
Optics Letters. 43 (2018) 16 - p. 4029 , 2018
Link:
https://doi.org/10.1364/ol.43.004029
RT Journal T1
Spectroscopic characterization of Si/Mo thin-film stack at extreme ultraviolet range
UL https://suche.suub.uni-bremen.de/peid=cr-10.1364_ol.43.004029&Exemplar=1&LAN=DE A1 Li, Yen-Yin A1 Lee, Yin-Wen A1 Ho, Tuan-Shu A1 Wang, Jhih-Hong A1 Wu, I-Chou A1 Hsu, Ting-Wei A1 Chen, Yu-Tung A1 Huang, Sheng-Lung PB The Optical Society YR 2018 SN 0146-9592 SN 1539-4794 JF Optics Letters VO 43 IS 16 SP 4029 LK http://dx.doi.org/https://doi.org/10.1364/ol.43.004029 DO https://doi.org/10.1364/ol.43.004029 SF ELIB - SuUB Bremen
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