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1 Ergebnisse
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Room temperature plasma-etching and surface passivation of ..:
Rodriguez de Marcos, Luis V.
;
Boris, David R.
;
Gray, Emrold
...
Optical Materials Express. 11 (2021) 3 - p. 740 , 2021
Link:
https://doi.org/10.1364/ome.417475
RT Journal T1
Room temperature plasma-etching and surface passivation of far-ultraviolet Al mirrors using electron beam generated plasmas
UL https://suche.suub.uni-bremen.de/peid=cr-10.1364_ome.417475&Exemplar=1&LAN=DE A1 Rodriguez de Marcos, Luis V. A1 Boris, David R. A1 Gray, Emrold A1 del Hoyo, Javier G. A1 Kozen, Alexander C. A1 Richardson, Joseph G. A1 Rosenberg, Samantha G. A1 Walton, Scott G. A1 Wheeler, Virginia A1 Wollack, Edward J. A1 Woodward, Jeffrey M. A1 Quijada, Manuel A. PB Optica Publishing Group YR 2021 SN 2159-3930 JF Optical Materials Express VO 11 IS 3 SP 740 LK http://dx.doi.org/https://doi.org/10.1364/ome.417475 DO https://doi.org/10.1364/ome.417475 SF ELIB - SuUB Bremen
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