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Dry etching of epitaxial InGaAs/InAlAs/InAlGaAs structures ..:
Nazib, Sami
;
Hutchins-Delgado, Troy
;
Sharma, Aadit
...
Optical Materials Express. , 2024
Link:
https://doi.org/10.1364/ome.506739
RT Journal T1
Dry etching of epitaxial InGaAs/InAlAs/InAlGaAs structures for fabrication of photonic integrated circuits
UL https://suche.suub.uni-bremen.de/peid=cr-10.1364_ome.506739&Exemplar=1&LAN=DE A1 Nazib, Sami A1 Hutchins-Delgado, Troy A1 Sharma, Aadit A1 Lee, Hosuk A1 Jamil, Erum A1 Withers, Nathan A1 Rotter, Thomas A1 Addamane, Sadhvikas A1 Nogan, John A1 James, Anthony A1 ross, willard A1 Pete, Douglas A1 Smolyakov, Gennady A1 Balakrishnan, Ganesh A1 Osinski, Marek PB Optica Publishing Group YR 2024 SN 2159-3930 JF Optical Materials Express LK http://dx.doi.org/https://doi.org/10.1364/ome.506739 DO https://doi.org/10.1364/ome.506739 SF ELIB - SuUB Bremen
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