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1 Ergebnisse
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Sub-nm depth resolution in sputter depth profiling by low e..:
Lee, Hyung-Ik
;
Moon, Dae Won
;
Oh, Suhk Kun
...
e-Journal of Surface Science and Nanotechnology. 2 (2004) - p. 24-27 , 2004
Link:
https://doi.org/10.1380/ejssnt.2004.24
RT Journal T1 <Title>Sub-nm depth resolution in sputter depth profiling by low energy ion bombardment</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1380_ejssnt.2004.24&Exemplar=1&LAN=DE A1 Lee, Hyung-Ik A1 Moon, Dae Won A1 Oh, Suhk Kun A1 Kang, Hee Jae A1 Kim, Hyun Kyong A1 Won, Jeong Yun PB Surface Science Society Japan YR 2004 SN 1348-0391 JF e-Journal of Surface Science and Nanotechnology VO 2 SP 24 OP 27 LK http://dx.doi.org/https://doi.org/10.1380/ejssnt.2004.24 DO https://doi.org/10.1380/ejssnt.2004.24 SF ELIB - SuUB Bremen
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