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National Project on 45 to 32 nm Metal Oxide Semiconductor F..:

Hwang, Huey-liang ; Wang, C. W. ; Chang, K. H....
e-Journal of Surface Science and Nanotechnology.  7 (2009)  - p. 507-512 , 2009
Link: https://doi.org/10.1380/ejssnt.2009.507