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1 Ergebnisse
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Linear Relationship between Reactive Gas Flow Rate and Targ..:
Nakano, Takeo
;
Kimura, Kosuke
;
Iijima, Yuto
...
e-Journal of Surface Science and Nanotechnology. 22 (2024) 3 - p. 199-206 , 2024
Link:
https://doi.org/10.1380/ejssnt.2024-013
RT Journal T1 <Title>Linear Relationship between Reactive Gas Flow Rate and Target Power at Mode Transitions in Reactive Sputtering</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1380_ejssnt.2024-013&Exemplar=1&LAN=DE A1 Nakano, Takeo A1 Kimura, Kosuke A1 Iijima, Yuto A1 Takeuchi, Masato A1 Oya, Kei A1 Nagao, Masayoshi A1 Ohsaki, Hisashi PB Surface Science Society Japan YR 2024 SN 1348-0391 JF e-Journal of Surface Science and Nanotechnology VO 22 IS 3 SP 199 OP 206 LK http://dx.doi.org/https://doi.org/10.1380/ejssnt.2024-013 DO https://doi.org/10.1380/ejssnt.2024-013 SF ELIB - SuUB Bremen
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