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1 Ergebnisse
1
Engineering SiO2 Nanoparticles: A Perspective on Chemical M..:
Lee, Ganggyu
;
Lee, Kangchun
;
Sun, Seho
..
KONA Powder and Particle Journal. , 2023
Link:
https://doi.org/10.14356/kona.2025001
RT Journal T1
Engineering SiO2 Nanoparticles: A Perspective on Chemical Mechanical Planarization Slurry for Advanced Semiconductor Processing
UL https://suche.suub.uni-bremen.de/peid=cr-10.14356_kona.2025001&Exemplar=1&LAN=DE A1 Lee, Ganggyu A1 Lee, Kangchun A1 Sun, Seho A1 Song, Taeseup A1 Paik, Ungyu PB Hosokawa Powder Technology Foundation YR 2023 SN 0288-4534 SN 2187-5537 JF KONA Powder and Particle Journal LK http://dx.doi.org/https://doi.org/10.14356/kona.2025001 DO https://doi.org/10.14356/kona.2025001 SF ELIB - SuUB Bremen
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