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In situ RECRYSTALLIZATION OF IMPLANTED Si IN A HIGH-VOLTAGE..:

, In: EPM '89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR,
Hoehl, D. ; Bartsch, H. ; Heera, V.... - p. 155-157 , 1989
Link: https://doi.org/10.1515/9783112575666-023