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EPITAXIAL LATERAL OVERGROWTH OF AMORPHOUS CVD SILICON FILMS..:

, In: EPM '89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR,
Voelskow, M. ; Skorupa, W. ; Wollschlager, K.... - p. 183-186 , 1989
Link: https://doi.org/10.1515/9783112575666-032