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1 Ergebnisse
1
RANGE PROFILE CALCULATIONS FOR THE HIGH ENERGY IMPLANTATION..:
, In:
EPM 87. Energy Pulse and Particle Beam Modification of Materials
,
Posselt, M.
;
Skorupa, W.
- p. 146-148 , 1988
Link:
https://doi.org/10.1515/9783112611203-020
RT T1 <cTitle>EPM 87. Energy Pulse and Particle Beam Modification of Materials</cTitle>: T1 <Title>RANGE PROFILE CALCULATIONS FOR THE HIGH ENERGY IMPLANTATION OF PHOSPHORUS INTO SILICON</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1515_9783112611203-020&Exemplar=1&LAN=DE A1 Posselt, M. A1 Skorupa, W. PB De Gruyter YR 1988 SP 146 OP 148 LK http://dx.doi.org/https://doi.org/10.1515/9783112611203-020 DO https://doi.org/10.1515/9783112611203-020 SF ELIB - SuUB Bremen
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