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1
ELECTRICAL CHARACTERIZATION OP THICK SOI-FILMS:
, In:
EPM 87. Energy Pulse and Particle Beam Modification of Materials
,
Banisch, R
;
Tillack, B
;
Hunger, B.
... - p. 446-449 , 1988
Link:
https://doi.org/10.1515/9783112611203-115
RT T1 <cTitle>EPM 87. Energy Pulse and Particle Beam Modification of Materials</cTitle>: T1 <Title>ELECTRICAL CHARACTERIZATION OP THICK SOI-FILMS</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1515_9783112611203-115&Exemplar=1&LAN=DE A1 Banisch, R A1 Tillack, B A1 Hunger, B. A1 Barna, P. A1 Gyulai, J. A1 Adam, M. A1 Schiller, V. PB De Gruyter YR 1988 SP 446 OP 449 LK http://dx.doi.org/https://doi.org/10.1515/9783112611203-115 DO https://doi.org/10.1515/9783112611203-115 SF ELIB - SuUB Bremen
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