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1 Ergebnisse
1
High Throughput CO2 laser Recrystallization for 3D integrat..:
, In:
EPM 87. Energy Pulse and Particle Beam Modification of Materials
,
Haberger, K.
;
Panish, P.
;
Buchner, R
.. - p. 468-470 , 1988
Link:
https://doi.org/10.1515/9783112611203-121
RT T1 <cTitle>EPM 87. Energy Pulse and Particle Beam Modification of Materials</cTitle>: T1 <Title>High Throughput CO2 laser Recrystallization for 3D integrated Devices</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1515_9783112611203-121&Exemplar=1&LAN=DE A1 Haberger, K. A1 Panish, P. A1 Buchner, R A1 Steinberger, H A1 Bower, R. PB De Gruyter YR 1988 SP 468 OP 470 LK http://dx.doi.org/https://doi.org/10.1515/9783112611203-121 DO https://doi.org/10.1515/9783112611203-121 SF ELIB - SuUB Bremen
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