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1 Ergebnisse
1
ANODIC OXIDATION OF Si AS A LOW TEMPERATURE OXIDATION METHO..:
, In:
EPM 87. Energy Pulse and Particle Beam Modification of Materials
,
Mende, G.
;
Deutscher, M.
;
Doring, H.J.
.. - p. 557-559 , 1988
Link:
https://doi.org/10.1515/9783112611203-151
RT T1 <cTitle>EPM 87. Energy Pulse and Particle Beam Modification of Materials</cTitle>: T1 <Title>ANODIC OXIDATION OF Si AS A LOW TEMPERATURE OXIDATION METHOD FOR PASSIVATION OF SEMICONDUCTOR DEVICES</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1515_9783112611203-151&Exemplar=1&LAN=DE A1 Mende, G. A1 Deutscher, M. A1 Doring, H.J. A1 Flietner, H A1 Scfimidt, B PB De Gruyter YR 1988 SP 557 OP 559 LK http://dx.doi.org/https://doi.org/10.1515/9783112611203-151 DO https://doi.org/10.1515/9783112611203-151 SF ELIB - SuUB Bremen
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