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1 Ergebnisse
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Electron tomography of microelectronic device interconnects:
Yang, Qing
;
Mardinly, John
;
Kübel, Christian
..
International Journal of Materials Research. 97 (2022) 7 - p. 880-884 , 2022
Link:
https://doi.org/10.1515/ijmr-2006-0142
RT Journal T1 <Title>Electron tomography of microelectronic device interconnects</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1515_ijmr-2006-0142&Exemplar=1&LAN=DE A1 Yang, Qing A1 Mardinly, John A1 Kübel, Christian A1 Nelson, Chris A1 Kisielowski, Christian PB Walter de Gruyter GmbH YR 2022 SN 2195-8556 SN 1862-5282 JF International Journal of Materials Research VO 97 IS 7 SP 880 OP 884 LK http://dx.doi.org/https://doi.org/10.1515/ijmr-2006-0142 DO https://doi.org/10.1515/ijmr-2006-0142 SF ELIB - SuUB Bremen
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