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1 Ergebnisse
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Advanced optical nanolithography by enhanced transmission t..:
Kim, Taeyeon
;
Ahn, Heesang
;
Kim, Soojung
...
Nanophotonics. 12 (2023) 11 - p. 2041-2050 , 2023
Link:
https://doi.org/10.1515/nanoph-2023-0145
RT Journal T1
Advanced optical nanolithography by enhanced transmission through bull's eye nanostructured meta-mask
UL https://suche.suub.uni-bremen.de/peid=cr-10.1515_nanoph-2023-0145&Exemplar=1&LAN=DE A1 Kim, Taeyeon A1 Ahn, Heesang A1 Kim, Soojung A1 Song, Hyerin A1 Choi, Jong-ryul A1 Kim, Kyujung PB Walter de Gruyter GmbH YR 2023 SN 2192-8606 SN 2192-8614 JF Nanophotonics VO 12 IS 11 SP 2041 OP 2050 LK http://dx.doi.org/https://doi.org/10.1515/nanoph-2023-0145 DO https://doi.org/10.1515/nanoph-2023-0145 SF ELIB - SuUB Bremen
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