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1 Ergebnisse
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A review of plasma-assisted deposition methods for amorphou..:
Roy, Anurag
;
Wang, Shengxi
;
Komvopoulos, Kyriakos
Journal of Materials Research. 38 (2023) 3 - p. 586-616 , 2023
Link:
https://doi.org/10.1557/s43578-022-00868-9
RT Journal T1
A review of plasma-assisted deposition methods for amorphous carbon thin and ultrathin films with a focus on the cathodic vacuum arc technique
UL https://suche.suub.uni-bremen.de/peid=cr-10.1557_s43578-022-00868-9&Exemplar=1&LAN=DE A1 Roy, Anurag A1 Wang, Shengxi A1 Komvopoulos, Kyriakos PB Springer Science and Business Media LLC YR 2023 SN 0884-2914 SN 2044-5326 JF Journal of Materials Research VO 38 IS 3 SP 586 OP 616 LK http://dx.doi.org/https://doi.org/10.1557/s43578-022-00868-9 DO https://doi.org/10.1557/s43578-022-00868-9 SF ELIB - SuUB Bremen
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