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1 Ergebnisse
1
Effect of DL-alanine as an auxiliary complexing agent in TS..:
Wang, Shuai
;
Wang, Ru
;
Liu, Bin
...
Journal of Materials Research. 38 (2023) 12 - p. 3172-3186 , 2023
Link:
https://doi.org/10.1557/s43578-023-01042-5
RT Journal T1 <Title>Effect of DL-alanine as an auxiliary complexing agent in TSV copper film CMP</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1557_s43578-023-01042-5&Exemplar=1&LAN=DE A1 Wang, Shuai A1 Wang, Ru A1 Liu, Bin A1 Dong, Yanwei A1 Zheng, Tao A1 Shi, Yunhui PB Springer Science and Business Media LLC YR 2023 SN 0884-2914 SN 2044-5326 JF Journal of Materials Research VO 38 IS 12 SP 3172 OP 3186 LK http://dx.doi.org/https://doi.org/10.1557/s43578-023-01042-5 DO https://doi.org/10.1557/s43578-023-01042-5 SF ELIB - SuUB Bremen
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