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A CMOS-MEMS cantilever sensor for capnometric applications:

Mirza, Asif ; Hamid, N. H. ; Khir, M. H. Md....
IEICE Electronics Express.  11 (2014)  9 - p. 20140113-20140113 , 2014
Link: https://doi.org/10.1587/elex.11.20140113