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1 Ergebnisse
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Advanced dry etching of GaAs/AlGaAs multilayer wafer with I..:
Adachi, Yuki
;
Xiong, Yifan
;
Ye, Hanqiao
...
IEICE Electronics Express. 20 (2023) 7 - p. 20230054-20230054 , 2023
Link:
https://doi.org/10.1587/elex.20.20230054
RT Journal T1 <Title>Advanced dry etching of GaAs/AlGaAs multilayer wafer with InAs quantum dot for circular defect in photonic crystal laser</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1587_elex.20.20230054&Exemplar=1&LAN=DE A1 Adachi, Yuki A1 Xiong, Yifan A1 Ye, Hanqiao A1 Zuo, Rubing A1 Morita, Masaya A1 Kaichi, Kenta A1 Kinoshita, Ryosei A1 Morifuji, Masato A1 Maruta, Akihiro A1 Kajii, Hirotake A1 Kondow, Masahiko PB Institute of Electronics, Information and Communications Engineers (IEICE) YR 2023 SN 1349-2543 JF IEICE Electronics Express VO 20 IS 7 SP 20230054 OP 20230054 LK http://dx.doi.org/https://doi.org/10.1587/elex.20.20230054 DO https://doi.org/10.1587/elex.20.20230054 SF ELIB - SuUB Bremen
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