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1 Ergebnisse
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A sparse matrix model-based optical proximity correction al..:
Lin, Bin
;
Yan, Xiao-lang
;
Shi, Zheng
.
Journal of Zhejiang University SCIENCE C. 12 (2011) 5 - p. 436-442 , 2011
Link:
https://doi.org/10.1631/jzus.c1000219
RT Journal T1 <Title>A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1631_jzus.c1000219&Exemplar=1&LAN=DE A1 Lin, Bin A1 Yan, Xiao-lang A1 Shi, Zheng A1 Yang, Yi-wei PB Zhejiang University Press YR 2011 SN 1869-1951 SN 1869-196X JF Journal of Zhejiang University SCIENCE C VO 12 IS 5 SP 436 OP 442 LK http://dx.doi.org/https://doi.org/10.1631/jzus.c1000219 DO https://doi.org/10.1631/jzus.c1000219 SF ELIB - SuUB Bremen
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