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1 Ergebnisse
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Overlay Mark Design Using Irregular Grating Patterns:
Lee, Hyun-Chul
;
Chang, Hyun-Jin
;
Woo, Ho-Sung
International Journal on Advanced Science, Engineering and Information Technology. 14 (2024) 2 - p. 548-554 , 2024
Link:
https://doi.org/10.18517/ijaseit.14.2.19659
RT Journal T1 <Title>Overlay Mark Design Using Irregular Grating Patterns</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.18517_ijaseit.14.2.19659&Exemplar=1&LAN=DE A1 Lee, Hyun-Chul A1 Chang, Hyun-Jin A1 Woo, Ho-Sung PB Insight Society YR 2024 SN 2460-6952 SN 2088-5334 JF International Journal on Advanced Science, Engineering and Information Technology VO 14 IS 2 SP 548 OP 554 LK http://dx.doi.org/https://doi.org/10.18517/ijaseit.14.2.19659 DO https://doi.org/10.18517/ijaseit.14.2.19659 SF ELIB - SuUB Bremen
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