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1
Plasma Treatment Effect on the Off Current Characteristics ..:
Yamakawa, S.
;
Yabuta, S.
;
Ban, A.
...
SID Symposium Digest of Technical Papers. 29 (1998) 1 - p. 443-446 , 1998
Link:
https://doi.org/10.1889/1.1833787
RT Journal T1 <Title>Plasma Treatment Effect on the Off Current Characteristics of a‐Si TFT</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1889_1.1833787&Exemplar=1&LAN=DE A1 Yamakawa, S. A1 Yabuta, S. A1 Ban, A. A1 Okamoto, M. A1 Katayama, M. A1 Ishii, Y. A1 Hijikigawa, M. PB Wiley YR 1998 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 29 IS 1 SP 443 OP 446 LK http://dx.doi.org/https://doi.org/10.1889/1.1833787 DO https://doi.org/10.1889/1.1833787 SF ELIB - SuUB Bremen
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