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1 Ergebnisse
1
Effects of N-Face Finishing on Geometry of Double-Side Poli..:
Namiki Precision Jewel Co., Ltd., 3-8-22 Shinden, Adachi, Tokyo 123-8511, Japan
;
Koyama, Koji
;
Aida, Hideo
...
International Journal of Automation Technology. 8 (2014) 1 - p. 121-127 , 2014
Link:
https://doi.org/10.20965/ijat.2014.p0121
RT Journal T1
Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate
UL https://suche.suub.uni-bremen.de/peid=cr-10.20965_ijat.2014.p0121&Exemplar=1&LAN=DE A1 Namiki Precision Jewel Co., Ltd., 3-8-22 Shinden, Adachi, Tokyo 123-8511, Japan A1 Koyama, Koji A1 Aida, Hideo A1 Uneda, Michio A1 Takeda, Hidetoshi A1 Kim, Seong-Woo A1 Takei, Hiroki A1 Yamazaki, Tsutomu A1 Doi, Toshiro A1 Kyushu University, 6-1 Kasuga Kouen, Kasuga, Fukuoka 816-8580, Japan A1 Kanazawa Institute of Technology, 7-1 Ogigaoka, Nonoichi, Ishikawa 921-8501, Japan PB Fuji Technology Press Ltd. YR 2014 SN 1883-8022 SN 1881-7629 JF International Journal of Automation Technology VO 8 IS 1 SP 121 OP 127 LK http://dx.doi.org/https://doi.org/10.20965/ijat.2014.p0121 DO https://doi.org/10.20965/ijat.2014.p0121 SF ELIB - SuUB Bremen
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