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1 Ergebnisse
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Fabrication of High Aspect Ratio Silicon Nanostructure with..:
Tokyo Metropolitan University
;
Moronuki, Nobuyuki
;
Phan, Nguyen
...
International Journal of Automation Technology. 10 (2016) 6 - p. 971-976 , 2016
Link:
https://doi.org/10.20965/ijat.2016.p0971
RT Journal T1
Fabrication of High Aspect Ratio Silicon Nanostructure with Sphere Lithography and Metal-Assisted Chemical Etching and its Wettability
UL https://suche.suub.uni-bremen.de/peid=cr-10.20965_ijat.2016.p0971&Exemplar=1&LAN=DE A1 Tokyo Metropolitan University A1 Moronuki, Nobuyuki A1 Phan, Nguyen A1 Keyaki, Norito A1 , A1 Mitsubishi Plastics, Inc. PB Fuji Technology Press Ltd. YR 2016 SN 1883-8022 SN 1881-7629 JF International Journal of Automation Technology VO 10 IS 6 SP 971 OP 976 LK http://dx.doi.org/https://doi.org/10.20965/ijat.2016.p0971 DO https://doi.org/10.20965/ijat.2016.p0971 SF ELIB - SuUB Bremen
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