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1 Ergebnisse
1
Flexible Fiber Conditioner for Fine Conditioning of Polishi..:
Uneda, Michio
;
Takahashi, Naoki
;
Fujita, Takashi
...
International Journal of Automation Technology. 15 (2021) 6 - p. 878-884 , 2021
Link:
https://doi.org/10.20965/ijat.2021.p0878
RT Journal T1 <Title>Flexible Fiber Conditioner for Fine Conditioning of Polishing Pad and its Evaluation in Chemical Mechanical Polishing: Verification of SUS-FFC on Soft Urethane Foam Pad and Proposal of PEEK-FFC</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.20965_ijat.2021.p0878&Exemplar=1&LAN=DE A1 Uneda, Michio A1 Takahashi, Naoki A1 Fujita, Takashi A1 Arai, Yutaro A1 Kanazawa Institute of Technology 3-1 Yatsukaho, Hakusan, Ishikawa 924-0838, Japan A1 Kindai University, Higashi-Osaka, Japan A1 Showa Industries International Co., Ltd., Hirakata, Japan PB Fuji Technology Press Ltd. YR 2021 SN 1883-8022 SN 1881-7629 JF International Journal of Automation Technology VO 15 IS 6 SP 878 OP 884 LK http://dx.doi.org/https://doi.org/10.20965/ijat.2021.p0878 DO https://doi.org/10.20965/ijat.2021.p0878 SF ELIB - SuUB Bremen
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