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Thickness Measurement of Aluminum Thin Film using Dispersio..:
Park, Ik Keun
;
Park, Tae Sung
International Journal on Smart Sensing and Intelligent Systems. 7 (2014) 5 - p. 1-4 , 2014
Link:
https://doi.org/10.21307/ijssis-2019-049
RT Journal T1 <Title>Thickness Measurement of Aluminum Thin Film using Dispersion Characteristic of Surface Acoustic Wave</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.21307_ijssis-2019-049&Exemplar=1&LAN=DE A1 Park, Ik Keun A1 Park, Tae Sung PB Walter de Gruyter GmbH YR 2014 SN 1178-5608 JF International Journal on Smart Sensing and Intelligent Systems VO 7 IS 5 SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.21307/ijssis-2019-049 DO https://doi.org/10.21307/ijssis-2019-049 SF ELIB - SuUB Bremen
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