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1 Ergebnisse
1
Feature Vectors Based on Wire Width and Distance for Lithog..:
Kataoka, Gaku
;
Yamamoto, Masahiro
;
Inagi, Masato
..
IPSJ Transactions on System and LSI Design Methodology. 16 (2023) 0 - p. 2-11 , 2023
Link:
https://doi.org/10.2197/ipsjtsldm.16.2
RT Journal T1
Feature Vectors Based on Wire Width and Distance for Lithography Hotspot Detection
UL https://suche.suub.uni-bremen.de/peid=cr-10.2197_ipsjtsldm.16.2&Exemplar=1&LAN=DE A1 Kataoka, Gaku A1 Yamamoto, Masahiro A1 Inagi, Masato A1 Nagayama, Shinobu A1 Wakabayashi, Shin'ichi PB Information Processing Society of Japan YR 2023 SN 1882-6687 JF IPSJ Transactions on System and LSI Design Methodology VO 16 IS 0 SP 2 OP 11 LK http://dx.doi.org/https://doi.org/10.2197/ipsjtsldm.16.2 DO https://doi.org/10.2197/ipsjtsldm.16.2 SF ELIB - SuUB Bremen
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