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Feature Vectors Based on Wire Width and Distance for Lithog..:

Kataoka, Gaku ; Yamamoto, Masahiro ; Inagi, Masato..
IPSJ Transactions on System and LSI Design Methodology.  16 (2023)  0 - p. 2-11 , 2023
Link: https://doi.org/10.2197/ipsjtsldm.16.2