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1 Ergebnisse
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Thin film imaging with CARL photoresist at the optical reso..:
Hien, Stefan
;
Czech, Günther
;
Domke, Wolf-Dieter
...
Journal of Photopolymer Science and Technology. 12 (1999) 4 - p. 673-678 , 1999
Link:
https://doi.org/10.2494/photopolymer.12.673
RT Journal T1 <Title>Thin film imaging with CARL photoresist at the optical resolution limit</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.12.673&Exemplar=1&LAN=DE A1 Hien, Stefan A1 Czech, Günther A1 Domke, Wolf-Dieter A1 Richter, Ernst A1 Sebald, Michael A1 Stiebert, Iris PB Technical Association of Photopolymers, Japan YR 1999 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 12 IS 4 SP 673 OP 678 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.12.673 DO https://doi.org/10.2494/photopolymer.12.673 SF ELIB - SuUB Bremen
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