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1 Ergebnisse
1
Design of Novel ArF Negative Resist System for Phase-Shifti..:
Yokoyama, Yoshiyuki
;
Hattori, Takashi
;
Kimura, Kaori
..
Journal of Photopolymer Science and Technology. 13 (2000) 4 - p. 579-588 , 2000
Link:
https://doi.org/10.2494/photopolymer.13.579
RT Journal T1
Design of Novel ArF Negative Resist System for Phase-Shifting Lithography Using Androsterone Structure with .DELTA.-Hydroxy Acid
UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.13.579&Exemplar=1&LAN=DE A1 Yokoyama, Yoshiyuki A1 Hattori, Takashi A1 Kimura, Kaori A1 Tanaka, Toshihiko A1 Shiraishi, Hiroshi PB Technical Association of Photopolymers, Japan YR 2000 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 13 IS 4 SP 579 OP 588 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.13.579 DO https://doi.org/10.2494/photopolymer.13.579 SF ELIB - SuUB Bremen
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