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Current Status of the EUV Engineering Test Stand:
Leung, Alvin H.
;
Tichenor, Daniel A.
;
Replogle, William C.
...
Journal of Photopolymer Science and Technology. 15 (2002) 3 - p. 351-360 , 2002
Link:
https://doi.org/10.2494/photopolymer.15.351
RT Journal T1 <Title>Current Status of the EUV Engineering Test Stand</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.15.351&Exemplar=1&LAN=DE A1 Leung, Alvin H. A1 Tichenor, Daniel A. A1 Replogle, William C. A1 Goldsmith, John E. M. A1 Kubiak, Glenn D. A1 Stulen, Richard H. A1 Ballard, William P. A1 Jefferson, Karen L. A1 Klebanoff, Leonard E. A1 O'Connell, Donna J. A1 Wronosky, John B. A1 Taylor, John S. A1 Folta, James A. A1 Hale, Layton C. A1 Chapman, Henry N. A1 Sweeney, Donald W. A1 Lee, Sang H. A1 Attwood, David T. A1 Goldberg, Kenneth A. A1 Naulleau, Patrick PB Technical Association of Photopolymers, Japan YR 2002 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 15 IS 3 SP 351 OP 360 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.15.351 DO https://doi.org/10.2494/photopolymer.15.351 SF ELIB - SuUB Bremen
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