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Development Status of High Performance Materials for Immers..:
Yoshida, Masaaki
;
Endo, Kotaro
;
Ishizuka, Keita
.
Journal of Photopolymer Science and Technology. 17 (2004) 4 - p. 603-607 , 2004
Link:
https://doi.org/10.2494/photopolymer.17.603
RT Journal T1 <Title>Development Status of High Performance Materials for Immersion Lithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.17.603&Exemplar=1&LAN=DE A1 Yoshida, Masaaki A1 Endo, Kotaro A1 Ishizuka, Keita A1 Sato, Mitsuru PB Technical Association of Photopolymers, Japan YR 2004 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 17 IS 4 SP 603 OP 607 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.17.603 DO https://doi.org/10.2494/photopolymer.17.603 SF ELIB - SuUB Bremen
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