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1 Ergebnisse
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Novel Spin-on Carbon Hard Mask with Hardening by Ion Implan..:
Ishibashi, Takeo
;
Ono, Yoshiharu
;
Yamaguchi, Atsumi
...
Journal of Photopolymer Science and Technology. 20 (2007) 3 - p. 365-372 , 2007
Link:
https://doi.org/10.2494/photopolymer.20.365
RT Journal T1 <Title>Novel Spin-on Carbon Hard Mask with Hardening by Ion Implantation</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.20.365&Exemplar=1&LAN=DE A1 Ishibashi, Takeo A1 Ono, Yoshiharu A1 Yamaguchi, Atsumi A1 Ogawa, Sachiko A1 Hanawa, Tetsuro A1 Shinohara, Masaaki A1 Tadokoro, Masahiro A1 Yonekura, Kazumasa A1 Mitani, Yuko A1 Matsuda, Keiko A1 Hirori, Hideaki A1 Miyamoto, Takashi A1 Matsunobu, Takeshi PB Technical Association of Photopolymers, Japan YR 2007 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 20 IS 3 SP 365 OP 372 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.20.365 DO https://doi.org/10.2494/photopolymer.20.365 SF ELIB - SuUB Bremen
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