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Quartz-Crystal-Microbalance Study for Dissolution of Resist..:
Toriumi, Minoru
Journal of Photopolymer Science and Technology. 20 (2007) 4 - p. 585-590 , 2007
Link:
https://doi.org/10.2494/photopolymer.20.585
RT Journal T1 <Title>Quartz-Crystal-Microbalance Study for Dissolution of Resist Polymers</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.20.585&Exemplar=1&LAN=DE A1 Toriumi, Minoru PB Technical Association of Photopolymers, Japan YR 2007 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 20 IS 4 SP 585 OP 590 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.20.585 DO https://doi.org/10.2494/photopolymer.20.585 SF ELIB - SuUB Bremen
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