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1 Ergebnisse
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Graded Spin-on Organic Bottom Antireflective Coating for Hi..:
Goldfarb, Dario L.
;
Vyklicky, Libor
;
Burns, Sean D.
...
Journal of Photopolymer Science and Technology. 21 (2008) 3 - p. 397-404 , 2008
Link:
https://doi.org/10.2494/photopolymer.21.397
RT Journal T1 <Title>Graded Spin-on Organic Bottom Antireflective Coating for High NA Immersion Lithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.21.397&Exemplar=1&LAN=DE A1 Goldfarb, Dario L. A1 Vyklicky, Libor A1 Burns, Sean D. A1 Petrillo, Karen A1 Arnold, John A1 Lisi, Anthony A1 Pfeiffer, Dirk A1 Sanders, Daniel D. A1 Allen, Robert D. A1 Medeiros, David R. A1 Owe-Yang, Dah Chung A1 Noda, Kazumi A1 Tachiban, Seiichiro A1 Shirai, Shozo PB Technical Association of Photopolymers, Japan YR 2008 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 21 IS 3 SP 397 OP 404 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.21.397 DO https://doi.org/10.2494/photopolymer.21.397 SF ELIB - SuUB Bremen
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