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JSR EUV Resist Development toward 22nmhp Design and Beyond:
Kimura, Tooru
;
Nishino, Kouta
;
Shimizu, Makoto
...
Journal of Photopolymer Science and Technology. 23 (2010) 5 - p. 643-648 , 2010
Link:
https://doi.org/10.2494/photopolymer.23.643
RT Journal T1 <Title>JSR EUV Resist Development toward 22nmhp Design and Beyond</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.23.643&Exemplar=1&LAN=DE A1 Kimura, Tooru A1 Nishino, Kouta A1 Shimizu, Makoto A1 Hirai, Yuuki A1 Maruyama, Ken A1 Kai, Toshiyuki PB Technical Association of Photopolymers, Japan YR 2010 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 23 IS 5 SP 643 OP 648 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.23.643 DO https://doi.org/10.2494/photopolymer.23.643 SF ELIB - SuUB Bremen
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